Precision positioning using a novel six axes compliant nano-manipulator
نویسندگان
چکیده
منابع مشابه
Survey on Recent Designs of Compliant Micro-/Nano-Positioning Stages
Micromanipulation is a hot topic due to its enabling role in various research fields. In order to perform a high precision operation at a small scale, compliant mechanisms have been proposed and applied for decades. In microscale manipulation, micro-/nano-positioning is the most fundamental operation because a precision positioning is the premise of subsequent operations. This paper is concentr...
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ژورنال
عنوان ژورنال: Microsystem Technologies
سال: 2016
ISSN: 0946-7076,1432-1858
DOI: 10.1007/s00542-016-2931-2